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研究人才詳細資料


出版年月 著作類別 著作名稱 作者 收錄出處
2024-02 期刊論文 Aluminum-Coated Nanoridge Arrays with Dual Evanescent Wavelengths for Real-Time and Label-Free Cellular Analysis Kuang-Li Lee, Hsien-San Hou, Xu Shi, Meng-Lin You, Ming-Yang Pan, Yasutaka Matsuo, Ji-Yen Cheng, Hiroaki Misawa, and Pei-Kuen Wei J. Phys. Chem. C
2022-09 期刊論文 Dual Gold-Nanoslit Electrodes for Ultrasensitive Detection of Antigen–Antibody Reactions in Electrochemical Surface Plasmon Resonance Shu-Cheng Lo, Sheng-Hann Wang, Ting-Wei Chang, Kuang-Li Lee, Ruey-Lin Chern, and Pei-Kuen Wei ACS Sens.
2022-06 期刊論文 Direct detection of virus-like particles using color images of plasmonic nanostructures Yi-Ru Li, Kuang-Li Lee, Kuan-Ming Chen, Yun Cheng Lu, Pin Chieh Wu, Sy-Hann Chen, Jiun-Haw Lee, and Pei-Kuen Wei Optics Express
2021-08 期刊論文 Self-Referencing Biosensors Using Fano Resonance in Periodic Aluminium Nanostructures Shu-Cheng Lo, Chun-Wei Yeh, Sheng-Hann Wang, Chia-Wen Kuo, Kuang-Li Lee, Ruey-Lin Chern, Pei-Kuen Wei Nanoscale
2021-06 期刊論文 Screening anti-metastasis drugs by cell adhesion-induced color change in a biochip. Shih-En Chou, Kuang-Li Lee, Pei-Kuen Wei, Ji-Yen Cheng Lab Chip
2020-12 期刊論文 Multichannel nanoplasmonic platform for imidacloprid and fipronil residues rapid screen detection. Sheng-Hann Wang, Shu-Cheng Lo, Yung-Ju Tung, Chia-Wen Kuo, Yi-Hsin Tai, Shu-Yi Hsieh, Kuang-Li Lee, Shune-Rung Hsiao, Jenn-Feng Sheen, Ju-Chun Hsu, Pei-Kuen Wei Biosens. Bioelectron.
2020-11 期刊論文 Promising urinary miRNA biomarkers t-SPR profiling for urothelial cell carcinoma. Wing Kiu Yeung, Hsiao Fen Li, Cheng Lin Chung, Kuang Li Lee, Pei Kuen Wei, Heng Lin, Hsi Hsien Chen*, Ji Yen Cheng* Sensors and Actuators B Chemical
2020-07 期刊論文 High-Throughput and Dynamic Study of Drug and Cell Interactions Using Contrast Images in Aluminum-Based Nanoslit Arrays Kuang-Li Lee, Hsien-San Hou, Ji-Yen Cheng, and Pei-Kuen Wei Analytical Chemistry
2020-02 研討會論文 Aluminum Nanoslit Arrays with a Commercial Scanner and Intensity Self-Referencing Analysis for High-Throughput Cellular Adhesion Analysis Kuang-Li Lee, Hsien-San Hou, Ji-Yen Cheng, Pei-Kuen Wei
2019-12 期刊論文 A Concave Blazed-Grating-Based Smartphone Spectrometer for Multichannel Sensing Shu-Cheng Lo, En-Hung Lin, Kuang-Li Lee, Ting-Tung Liang, Jen-Chang Liu, Pei-Kuen Wei , and Wan-Shao Tsai IEEE Sensors Journal
2019-09 期刊論文 Injection compression molding of transmission-type Fano resonance biochips for multiplex sensing applications Kuang-Li Lee, Meng-Lin You, Xu Shi, Yi-Ru Li, Kosei Ueno, Hiroaki Misawab, and Pei-Kuen Wei Applied Materials Today
2019-07 期刊論文 Spectral contrast imaging method for mapping transmission surface plasmon images in metallic nanostructures Ming-Yang Pan, Deng-Kai Yang, Chih-Yu Lai, Jui-Hong Weng, Kuang-Li Lee, Lin-Chi Chen, Chia-Fu Chou, Pei-Kuen Wei Biosensors and Bioelectronics
2019-05 研討會論文 Transmission-type Fano resonance biochips for multiplex sensing applications Kuang-Li Lee, Meng-Lin You, Xu Shi, Yi-Ru Li, Kosei Ueno, Hiroaki Misawa, and Pei-Kuen Wei
2019-04 期刊論文 Simultaneous Assessment of Cell Morphology and Adhesion Using Aluminum Nanoslit-Based Plasmonic Biosensing Chips Hsien-San Hou, Kuang-Li Lee, Chen-Hung Wang, Tung-Han Hsieh, Juan-Jie Sun, Pei-Kuen Wei, and Ji-Yen Cheng Scientific Reports
2019-04 研討會論文 96-well capped gold nanoslits for backside-reflection plasmonic biosensing Kuang-Li Lee, Po-Cheng Tsai, Meng-Lin You, and Pei-Kuen Wei
2019-02 期刊論文 Aluminum Nanostructures for Surface-Plasmon-Resonance-Based Sensing Applications Kuang-Li Lee, Meng-Lin You, Pei-Kuen Wei ACS Applied Nano Materials
2019-01 研討會論文 Fabrication of nanoslit-based surface plasmon resonance arrays using compression-injection molding for multiplex bio-sensing applications. Kuang-Li Lee, Meng-Lin You, and Pei-Kuen Wei
2018-12 研討會論文 Dual Sensing Arrays for SPR and SERS Based on Nanowire/Nanorod Hybrid Nanostructures. Kuang-Li Lee, Chia-Yu Hung, Ming-Yang Pan, Tsung-Yeh Wu, Sen-Yeu Yang, and Pei-Kuen Wei
2018-12 其他 快速熱壓式奈米壓印技術於高靈敏度奈米鋁金屬結構生物感測器之製作與應用 李光立、許玄燁、游孟霖、魏培坤
2018-09 期刊論文 Dual Sensing Arrays for Surface Plasmon Resonance (SPR) and Surface‐Enhanced Raman Scattering (SERS) Based on Nanowire/Nanorod Hybrid Nanostructures Kuang‐Li Lee, Chia‐Yu Hung, Ming‐Yang Pan, Tsung‐Yeh Wu,Sen‐Yeu Yang, Pei‐Kuen Wei Advanced Materials Interfaces
2018-08 期刊論文 Multiplex detection of urinary miRNA biomarkers by transmission surface plasmon resonance Wing Kiu Yeung, Huai-Yi Chen, Juan-Jie Sun, Tung-Han Hsieh, Mansoureh Z. Mousavi, Hsi-Hsien Chen, Kuang-Li Lee, Heng Lin, Pei-Kuen Wei and Ji-Yen Cheng Analyst
2018-08 研討會論文 Capped gold nanoslits for backside-reflection plasmonic biosensing in multiple well plates. Kuang-Li Lee, Po-Cheng Tsai, Meng-Lin You, and Pei-Kuen Wei.
2018-07 期刊論文 Spectral Imaging Analysis for Ultrasensitive Biomolecular Detection Using Gold-Capped Nanowire Arrays Yi-Hsin Tai, Po-Han Fu, Kuang-Li Lee and Pei-Kuen Wei Sensors
2018-06 期刊論文 Enhancing Surface Sensing Sensitivity of Metallic Nanostructures using Blue-Shifted Surface Plasmon Mode and Fano Resonance Kuang-Li Lee, Chia-Chun Chang, Meng-Lin You, Ming-Yang Pan & Pei-Kuen Wei Scientific Reports
2018-06 研討會論文 Low-Cost and Rapid Fabrication of Aluminum Nanostructures for Sensitive Biosensors Using a Rapid Hot-Embossing Nanoimprint Method. Kuang-Li Lee, Hsuan-Yeh Hsu, Meng-Lin You, Pei-Kuen Wei
2018-05 期刊論文 Resonant position tracking method for smartphone-based surface plasmon sensor Ming-Yang Pan, Kuang-Li Lee, Shu-Cheng Lo, Pei-Kuen Wei Analytica Chimica Acta
2018-04 期刊論文 Optimization for Gold Nanostructure-Based Surface Plasmon Biosensors Using a Microgenetic Algorithm Po-Han Fu, Shu-Cheng Lo, Po-Cheng Tsai, Kuang-Li Lee, and Pei-Kuen Wei ACS Photonics
2018-01 期刊論文 Fabrication and applications of ultraflexible nanostructures using dielectric heating-assisted nanoimprint on PVC films Tsung-Yeh Wu, Po-Cheng Tsai, Shu-Cheng Lo, Yi-Ru Li, Kuang-Li Lee, Sen-Yeu Yang, Pei-Kuen Wei Current Applied Physics
2018-01 研討會論文 Aluminum-Based Nanostructures for Highly Sensitive Plasmonic Sensors Kuang-Li Lee, Hsuan-Yeh Hsu, Po-Cheng Tsai, Meng-Lin You, Ming-Yang Pan, and Pei-Kuen Wei
2017-12 研討會論文 Tailoring the Evanescent Field Decay Lengths of Surface Plasmon Resonances Using Alumina-Coated Aluminum Nanoslits Kuang-Li Lee, Po-Cheng Tsai, Meng-Lin You, Ming-Yang Pan, and Pei-Kuen Wei
2017-10 期刊論文 Enhancing Surface Sensitivity of Nanostructure-Based Aluminum Sensors Using Capped Dielectric Layers Kuang-Li Lee, Po-Cheng Tsai, Meng-Lin You, Ming-Yang Pan, Xu Shi, Kosei Ueno, Hiroaki Misawa, and Pei-Kuen Wei ACS OMEGA
2017-07 期刊論文 Low-Cost and Rapid Fabrication of Metallic Nanostructures for Sensitive Biosensors Using Hot-Embossing and Dielectric-Heating Nanoimprint Methods Kuang-Li Lee, Tsung-Yeh Wu, Hsuan-Yeh Hsu, Sen-Yeu Yang and Pei-Kuen Wei Sensors
2017-05 期刊論文 Chip-based digital surface plasmon resonance sensing platform for ultrasensitive biomolecular detection Ming-Yang Pan, Kuang-Li Lee, Likarn Wang, Pei-Kuen Wei Biosensors and Bioelectronics
2017-05 研討會論文 Fano Resonances in Alumina/Aluminum Capped Nanoslits for Highly Sensitive Plasmonic Sensors Kuang-Li Lee, Po Cheng Tsai, Shu Jiang, Masato Saito, Hiroyuki Yoshikawa, Eiichi Tamiya and Pei-Kuen Wei
2017-04 期刊論文 Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors Tsung-Yeh Wu, Hsuan-Yeh Hsu, Kuang-Li Lee, Sen-Yeu Yang, and Pei-Kuen Wei AIP Advances
2017-04 研討會論文 Fano resonances in capped metallic nanostructures for highly sensitive plasmonic sensors Kuang-Li Lee and Pei-Kuen Wei
2017-03 期刊論文 Enhancing angular sensitivity of plasmonic nanostructures using mode transition in hexagonal gold nanohole arrays En-Hung Lin, Wan-Shao Tsai, Kuang-Li Lee, Ming-Chang M. Lee, Pei-Kuen Wei Sensors and Actuators B: Chemical
2017-03 期刊論文 Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures Kuang-Li Lee, Hsuan-Yeh Hsu, Meng-Lin You, Chia-Chun Chang, Ming-Yang Pan, Xu Shi, Kosei Ueno, Hiroaki Misawa, and Pei-Kuen Wei Scientific Reports
2017-03 研討會論文 Sensitive and Label-Free Protein Chips using Surface Plasmon Resonance in Metallic Nanostructures Pei-Kuen Wei and Kuang-Li Lee
2016-12 研討會論文 Fano Resonances in Capped Aluminum Nanoslit Arrays for Highly Sensitive Plasmonic Sensors Kuang-Li Lee, Hsuan-Yeh Hsu, Meng-Lin You, Chia-Chun Chang, Ming-Yang Pan, Xu Shi, Kosei Ueno, Hiroaki Misawa, and Pei-Kuen Wei
2016-09 期刊論文 Enhancing the Surface Sensitivity of Metallic Nanostructures Using Oblique-Angle-Induced Fano Resonances Kuang-Li Lee, Chia-Chun Chang, Meng-Lin You, Ming-Yang Pan and Pei-Kuen Wei Scientific Reports
2016-09 研討會論文 Enhancing surface sensitivity of periodic metallic nanostructures using oblique-angle induced Fano resonances Kuang-Li Lee, Chia-Chun Chang, Meng-Lin You, Ming-Yang Pan, and Pei-Kuen Wei
2016-06 研討會論文 Tailoring the Fano couplings between gap plasmon and surface plasmon for highly surface-sensitive biosensors Kuang-Li Lee, Chia-Chun Chang, Meng-Lin You, Ming-Yang Pan and Pei-Kuen Wei
2016-03 期刊論文 Surface Plasmon Resonance Sensing: Periodic metallic nanostructures for high-sensitivity biosensing applications Kuang-Li Lee and Pei-Kuen Wei IEEE Nanotechnology Magazine
2016-03 研討會論文 Enhancing Surface Sensitivity of Metallic Nanostructures Using Oblique-Angle Induced Fano Resonances Kuang-Li Lee, Chia-Chun Chang, Ming-Yang Pan and Pei-Kuen Wei
2016-01 期刊論文 Nanoplasmonic Biochips for rapid label-free detection of imidacloprid Pesticides with a smartphone Kuang-Li Lee, Meng-Lin You, Chia-Hsin Tsai, En-Hung Lin, Shu-Yi Hsieh, Ming-Hsun Ho, Ju-Chun Hsu, Pei-Kuen Wei Biosensors and Bioelectronics
2016-01 期刊論文 Visualization of biosensors using enhanced surface plasmon resonances in capped silver nanostructures Kuang-Li Lee, Meng-Lin You, Cheng-Lin Tsai, Chia-Yu Hung, Shu-Yi Hsieh and Pei-Kuen Wei Analyst
2015-12 研討會論文 Enhancing Surface Sensitivity of Nanoplasmonic Sensors Using Capped Metallic Nanoslits with Oblique Incidence Meng-Lin You, Chia-Chun Chang, Pei-Kuen Wei, and Kuang-Li Lee
2015-09 研討會論文 Ultrasensitive sensors using enhanced surface plasmon resonances in capped metallic nanostructures Kuang-Li Lee and Pei-Kuen Wei
2015-08 期刊論文 Determination of the effective index and thickness of biomolecular layer by Fano resonances in gold nanogrid array Ming-Yang Pan, Kuang-Li Lee, Wan-Shao Tsai, Likarn Wang, and Pei-Kuen Wei Optics Express
2015-06 期刊論文 Urinary micro-RNA biomarker detection using capped gold nanoslit SPR in a microfluidic chip Mansoureh Z. Mousavi, Huai-Yi Chen, Kuang-Li Lee, Heng Lin,Hsi-Hsien Chen, Yuh-Feng Lin, Chung-Shun Wong, Hsiao Fen Li, Pei-Kuen Wei and Ji-Yen Cheng Analyst
2015-02 期刊論文 Ultrasensitive Biosensors Using Enhanced Fano Resonances in Capped Gold Nanoslit Arrays Kuang-Li Lee, Jhih-Bin Huang, Jhih-Wei Chang, Shu-Han Wu and Pei-Kuen Wei Scientific Reports
2014-11 專書論文 Plasmonic Nanoslit Arrays for Sensitive Biosensors Kuang-Li Lee, Shu-Han Wu, Pei-Kuen Wei Current Trends of Optics and Photonics (Topics in Applied Physics)
2014-09 研討會論文 Dual SPR-SERS Plasmonic Sensors Using Gold Nanoslits and Oblique Angle Deposition. Kuang-Li Lee, Chao-Hsien Cheng, Wei-Yi Chang, and Pei-Kuen Wei
2014-08 期刊論文 Enhancing detection sensitivity of metallic nanostructures by resonant coupling mode and spectral integration analysis En-Hung Lin, Wan-Shao Tsai, Kuang-Li Lee, Ming-Chang M. Lee, and Pei-Kuen Wei Optics Express
2014-05 研討會論文 Novel Biochips for Rapid Label-Free Detection with a Smartphone Kuang-Li Lee, Jhih-Wei Chang, Meng-Lin You, and Pei-Kuen Wei
2014-05 研討會論文 Novel plasmonic biochips for rapid point-of-care applications Kuang-Li Lee, Cheng-Lin Tsai, and Pei-Kuen Wei
2014-02 期刊論文 Dynamic monitoring of mechano-sensing of cells by gold nanoslit surface plasmon resonance sensor Shu-Han Wu, Kuang-Li Lee, Ruei-Hung Weng, Zhao-Xian Zheng, Arthur Chiou, Pei-Kuen Wei PLOS ONE
2013-12 期刊論文 Increased detection sensitivity of surface plasmon sensors using oblique induced resonant coupling Wan-Shao Tsai, Kuang-Li Lee, Ming-Yang Pan, and Pei-Kuen Wei Optics Letters
2013-10 期刊論文 Optofluidic Platform for Real-Time Monitoring of Live Cell Secretory Activities Using Fano Resonance in Gold Nanoslits Shu-Han Wu, Kuang-Li Lee, Arthur Chiou, Xuanhong Cheng, and Pei-Kuen Wei Small
2013-09 期刊論文 Cell viability monitoring using Fano resonance in gold nanoslit array Shu-Han Wu, Shu-Yi Hsieh, Kuang-Li Lee, Ruei-Hung Weng, Arthur Chiou and Pei-Kuen Wei Applied Physics Letters
2013-08 研討會論文 Ultrasensitive Biosensors Using Fano Resonances in Double-Layer Gold Nanostructures Kuang-Li Lee, Jhih-Bin Huang , Shu-Han Wu, and Pei-Kuen Wei
2013-05 期刊論文 High-Throughput Label-Free Detection Using a Gold Nanoslit Array With 2-D Spectral Images and Spectral Integration Methods Kuang-Li Lee, Jui-Ting Tsai, Min-Jian Chih, Yeong-Der Yao, Pei-Kuen Wei IEEE Journal of Selected Topics in Quantum Electronics
2013-02 期刊論文 Magnetic nanoparticle-enhanced SPR on gold nanoslits for ultra-sensitive, label-free detection of nucleic acid biomarkers Mansoureh Z. Mousavi, Huai-Yi Chen, Shu-Han Wu, Shih-Wei Peng, Kuang-Li Lee, Pei-Kuen Wei and Ji-Yen Cheng Analyst
2012-09 期刊論文 Improving Surface Plasmon Detection in Gold Nanostructures Using a Multi-Polarization Spectral Integration Method Kuang-Li Lee,Min-Jian Chih, Xu Shi, Kosei Ueno, Hiroaki Misawa, Pei-Kuen Wei Advanced Materials
2012-09 研討會論文 Improving Surface Plasmon Detection Limits of Dual-Period Gold Nanogrid Arrays Using a Multi-Polarization Spectral Integration Method Kuang-Li Lee, Min-Jian Chih, and Pei-Kuen Wei
2012-09 研討會論文 Improving Surface Plasmon Detection in Gold Nanostructures Using a Multi-Polarization Spectral Integration Method Kuang-Li Lee, Min-Jian Chih, and Pei-Kuen Wei
2012-04 期刊論文 Enhancing Surface Plasmon Detection Using Template-Stripped Gold Nanoslit Arrays on Plastic Films Kuang-Li Lee, Pei-Wen Chen, Shu-Han Wu, Jhih-Bin Huang, Sen-Yeu Yang, and Pei-Kuen Wei ACS Nano
2011-11 期刊論文 Sensitive biosensors using Fano resonance in single gold nanoslit with periodic grooves Kuang-Li Lee, Shu-Han Wu, Chia-Wei Lee, and Pei-Kuen Wei Optics Express
2011-09 期刊論文 Structure effect on sensitivity of gold nanoslits studied by spectral integration method Kuang-Li Lee, Yi-Hsin Tai, and Pei-Kuen Wei Plasmonics
2011-08 期刊論文 Optimization of periodic gold nanostructures for intensity-sensitive detection Kuang-Li Lee, Pei-Kuen Wei Applied Physics Letters
2011-06 期刊論文 Fabrication of gold sub-wavelength pore array using gas-assisted hot embossing with anodic aluminum oxide (AAO) template Wei-Yi Chang, Jing-Tang Wu, Kai-Heng Lin, Sen-Yeu Yang, Kuang-Li Lee, Pei-Kuen Wei Microelectronic Engineering
2011-05 研討會論文 Structure effect on sensitivity of gold nanoslits studied by spectral integration method Kuang-Li Lee, Yi-Hsin Tai, and Pei-Kuen Wei
2011-02 期刊論文 Novel fabrication of an Au nanocone array on polycarbonate for high performance surface-enhanced Raman scattering Wei-Yi Chang, Kai-Heng Lin, Jing-Tang Wu, Sen-Yeu Yang, Kuang-Li Lee, Pei-Kuen Wei J. Micromech. Microeng.
2010-11 期刊論文 Femtosecond laser-ultrasonic investigation of plasmonic fields on the metalgallium nitride interface Hung-Pin Chen, Yu-Chieh Wen, Yi-Hsin Chen, Cheng-Hua Tsai, Kuang-Li Lee,Pei-Kuen Wei, Jinn-Kong Sheu, Chi-Kuang Sun Applied Physics Letters
2010-09 期刊論文 Enhancing surface plasmon detection using ultrasmall nanoslits and multispectral integration method Kuang-Li Lee, Pei-Kuen Wei Small
2010-05 研討會論文 Comparisons of Surface Plasmon Sensitivities in Gold Nanostructures Using a Multispectral Analysis Kuang-Li Lee and Pei-Kuen Wei
2009-12 期刊論文 Intensity sensitivity of gold nanostructures and its application for high-throughput biosensing Kuang-Li Lee, Shu-Han Wu, Pei-Kuen Wei Optics Express
2009-11 期刊論文 Wide-field optical nano-profilometry using structured illumination Chun-Chieh Wang, Kuang-Li Lee, and Chau-Hwang Lee Optics Letters
2009-07 期刊論文 Giant Birefringence Induced by Plasmonic Nanoslit Arrays Shen-Yu Hsu, Kuang-Li Lee, En-Hong Lin, Ming-Chang Lee, Pei-Kuen Wei Appl. Phys. Lett.
2009-06 期刊論文 Focusing Subwavelength Light by Using Nanoholes in a Transparent Thin Film Pei-Kuen Wei, Wei-Lun Chang, Kunag-Li, Lee and En-Hong Lin Opt. Lett.
2008-12 期刊論文 Comparisons of Surface Plasmon Sensitivities in Periodic Gold Nanostructures Kuang-Li Lee, Way-Seen Wang and Pei-Kuen Wei Plasmonics
2008-10 期刊論文 Sensitive Label-Free Biosensors by Using Gap Plasmons in Gold Nanoslits Kuang-Li Lee,Way-Seen Wang and Pei-Kuen Wei Biosensors and Bioelectronics
2008-01 期刊論文 Extraction Enhancement in Organic Light Emitting Devices by Metallic Nanowire Arrays Shen-Yu Hsu, Ming-Chang Lee, Kuang-Li Lee and Pei-Kuen Wei Appled Physics Letters
2007-12 研討會論文 Comparisons of the Surface Plasmon Sensitivities in Metallic Nanostructures Kuang-Li Lee, Way-Seen Wang, and Pei-Kuen Wei
2007-08 期刊論文 Sensitive biosensor array using surface plasmon resonance on metallic nanoslits Kuang-Li Lee, Chia-Wei Lee, Way-Seen Wang and Pei-Kuen Wei Journal of Biomedical Optics
2007-06 期刊論文 Sensitive detection of nanoparticles using metallic nanoslit arrays Kuang-Li Lee, Chia-Wei Lee and Pei-Kuen Wei Applied Physics Letters
2007-05 期刊論文 Coupled waveguide-surface plasmon resonance biosensor with subwavelength grating F.-C. Chien, C.-Y. Lin, J.-N. Yih, K.-L. Lee, C.-W. Chang, P.-K. Wei, C.-C. Sun, S.-J. Chen Biosensors and Bioelectronics
2006-03 期刊論文 Optical waveguide biosensors constructed with subwavelength gratings Jenq-Nan Yih, Yi-Ming Chu, Yen-Chieh Mao, Wei-Han Wang, Fan-Ching Chien, Chun-Yu Lin, Kuang-Li Lee, Pei-Kuen Wei, Shean-Jen Chen Applied optics
2004-12 期刊論文 Fabricating high-aspect-ratio sub-diffraction-limit structures on silicon with two-photon photopolymerization and reactive ion etching C.-H. Lee, T.-W. Chang, K.-L. Lee, J.-Y. Lin and J. Wang Applied Physics A